• · Major role in relocation proj… 09-13
Firmly tighten, No additional washers or adhesive need. A relative strength increase 20~50%
You can confirm visually the type of chemical and leaking location instantly
Provide a robust solution that is process transparent to improve Vector defect performance and tool …
Upgrade is process transparent
Improve ESC Life time/ Improve Throughput 10%/ Improve PM Period & Particle